Diffractive Optical Elements, lithography

Additive fabrication of SiO2-based micro-optics with lag-free depth and reduced roughness

We propose an alternative method for fabricating DOEs without RIE lag and with improved surface smoothness.

Hexagonal diffractive optical elements

We explore the use of hexagonal grids as a new grid structure for DOE design and fabrication.

Additive diffractive optical elements fabrication by PECVP deposition of SiO2 and lift-off process

We propose a new way to fabricate multi-level DOEs by directly growing an optically transparent material on a glass substrate.

Additive lithographic fabrication of a Tilt-Gaussian-Vortex mask for focal plane wavefront sensing

We propose an additive lithographic fabrication process to realize simultaneous micrometer and millimeter features.

Etch-free additive lithographic fabrication methods for reflective and transmissive micro-optics

We propose an etch-free additive lithographic fabriction method for versatile reflective and transmissive DOEs.